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| Home > 製品紹介 > Semiconductor
/ LCD Division > Chemical & Slurry Close loop Control |
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- Slurry Delivery System (SDS) drawer replaced with high accuracy CLC Slurry Dispense Module
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Peristaltic pumps replaced with pinch valve and stepper motor (15 psi inlet pressure required)
– No orifice, precise flow control, PM interval of 1 year
Paddle Wheel Flow Monitor replaced with
Ultrasonic Flow Monitor
– No orifice, high accuracy, No PM requirement
Benefit: Cost saving, increase yield, proper alarm &
warning, longer PM interval |
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