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- Slurry Delivery System (SDS) drawer replaced with high accuracy CLC Slurry Dispense Module

- Peristaltic pumps replaced with pinch valve and stepper motor (15 psi inlet pressure required)

– No orifice, precise flow control, PM interval of 1 year Paddle Wheel Flow Monitor replaced with
  Ultrasonic Flow Monitor

– No orifice, high accuracy, No PM requirement Benefit: Cost saving, increase yield, proper
   alarm &   warning, longer PM interval
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