Home > 제품소개 > Semiconductor / LCD Division > History of Refurbishment and Module Retrofit P5000, Centura5200 DPS, DPS+ chamber retrofit &        Relocation Lam Etcher retrofit & Parts overhaul         1) System conversion TCP 9600 to TCP 9600SEII         2) System conversion RB 4520 to RB 4420 (Rainbow)         3) System conversion Clamp system to ESC system             (Rainbow &TCP)         AMAT Mirra Stand alone & On-trak and          Mirra Mesa Series Refurbishment, Relocation &          Wafer type conversion “notch” to “flat” & 6” to 8”          conversion Process Kit supply EBARA CMP EPO, F-REX 200 SeriesRefurbishment,          Size Conversion, Head upgrade, Finger, Pusher &          Roller available - Process Kit supply IPEC CMP 372, 472 and 776 Relocation and           Refurbishment, Parts supply               AMAT Endura5500 Relocation and its Chamber Retrofit AMAT Centura5200, Producer and its Chamber Retrofit          Mattson SHS2000, 2800 Refurbishment Parts overhaul & Process Kit supply Edward & Ebara Pump overhaul Refurbishment & 2nd source parts supply Hitachi S-8820, 8840, 9200 Refurbishment & Relocation OP series